Barry S Chemistry of Atomic Layer Deposition 2021

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pdf | 1.9 MB | English | Isbn:‎ B09M4CH6WV | Author: Seán Thomas Barry | Year: 2021

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Description:

This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.

Category:Metals & Alloys Engineering, Inorganic Chemistry, Engineering Power Systems

https://1dl.net/bd4kiwfs9j3o