Metal Impurities in Silicon- and Germanium-Based Technologies

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Metal Impurities in Silicon- and Germanium-Based Technologies: Origin, Characterization, Control, and Device Impact by Cor Claeys
English | EPUB | 2018 | 438 Pages | ISBN : 3319939246 | 8.6 MB
This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices' performance. Several control and possible gettering approaches are addressed.

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